"Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance ..."

Niels Quack et al. (2019)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2021-08-11

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Niels Quack, Hamed Sattari, Alain Y. Takabayashi, Yu Zhang, Pierre Edinger, Carlos Errando-Herranz, Kristinn B. Gylfason, Xiaojing Wang, Frank Niklaus, Moises A. Jezzini, How Yuan Hwang, Peter O'Brien, Marco A. G. Porcel, Cristina Lerma Arce, Saurav Kumar, Banafsheh Abasahl, Peter Verheyen, Wim Bogaerts:
Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits. OFC 2019: 1-3

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